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KMID : 0385519920050040455
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Analytical Science & Technology
1992 Volume.5 No. 4 p.455 ~ p.464
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Fourier Transform Infrared Spectroscopic Analysis of the Silylated Resist on Silicon Wafers in Semiconductor Lithographic Process
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강성철/Kang, Sung Chul
김수종/손민영/박춘근/Kim, Su Jong/Son, Min Young/Park, Chun Geun
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Abstract
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silylation, FT-IR, gas phase silylation.
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KEYWORD
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